Dongguan Mingrui Ceramic Technology Co.,Ltd
Model No.: MRT-255
Certification: CE, ISO
Item: Ceramic Handling Arms
Function: Wafer Carrier
Shape: Customized By Customer
Finishing: With Built In Follow Channels
Port Type: Vacuum Port
Feature: High Temperature Resistance
Packaging: Packed in a bubble bag individually, then separated by a foam, finally put in standard export carton packing, or OEM packing.
Productivity: 10000 pieces/month
Place of Origin: Guangdong, China
Supply Ability: 1000000 pieces/ year
Certificate: ISO 9001-2015
HS Code: 8547100000
Advanced Ceramic Semiconductor Industry Ceramic Handling Arm
Products : Chucks and wafer end-effectors
Chucks and end-effectors are used to manipulate and carry silicon wafers through the whole production process. The chemical inertness of ceramics allows those components to be contamination-free for the wafer in particular in chemical wet etching baths.
These items enable the handling of large-size wafers and can be designed with vacuum channels in order to hold the part.
Ceramic components can be used in the following semiconductor process equipment :
The products are made of high purity Zirconia ceramics (Zro₂) and Alumina Ceramics (Al₂O₃) material, which have
advanced and excellent performances, fabulously popular .
| Properties || Units || 95 Alumina || 99 Alumina || ZrO2 |
| Density || g / cm³ || 3.65 ||3.9||5.95-6.05|
| Water absorption || % ||0||0||0|
| Coefficient of thermal expansion || 10-6/K || 7.9 ||8.5||10.5|
| Modulus of Elasticity Young's Mod || GPa ||280||340||210|
| Poisson's ratio ||/||0.21||0.23||0.3|
|HV Hardness|| MPa ||1400||1700||1300-1365|
| Flexural Strength @ room temperature || MPa ||280||320||950|
| Flexural Strength @700°C || MPa ||220||230||210|
| Compressive Strength @ room temperature || MPa ||2000||2200||2000|
| Fracture Toughness || MPa *m 1/2 ||3.8||4.3||10|
| Heat conductivity @ room temperature || W/ m*k ||18-25|| 26-30 ||2-2.2|
| Electrical Resistivity @ room temperature || Ω*mm2 /m || 10^15 || 10^16 || 10^15 |
| Max use temperature || °C ||1850||2200||1500|
| Resistance to acid alkaline || / || high || high || high |
| Dielectric Constant || / ||9.5||9.8||26|
| Dielectric Strength || KV/mm ||10||10||10|
| Thermol Shock Resistance || △ T ( °C ) ||220||190||280-350|
| Tensile Strength @ 25 °C || MPa ||200||248||260|
| Thermal Conductivity(25℃) || W/m·K ||30||35||3|
Advantages of semiconductor ceramics:
2. Self Lubricating.
3. Long Service Life.
4. Good Polished Surface.
5. Environmental and Healthy.
6. Superior Mechanical Strength.
7. High Corrosion and Wear Resistance.
8. Good Insulation Performance Precision.
9. High Temperature and Pressure Resistance.
10. High Purity Zirconia and Alumina Ceramic Material.
One-stop production, from the raw material (powder) to final products, control the quality strickly of every production link.
Packaging and Shipping:
Semiconductor Ceramic Arm will be packed in a bubble bag individually, then put in standard export carton packing,
or OEM packing.
Shipped by Express ( DHL, TNT, UPS, Fedex, EMS ), Air, or Sea transportation.
Mingrui has professional OEM experience in manufacturing industrial ceramic parts for so many years. And
very advanced technologies in the production of Zirconia Ceramic Rod and Alumina Ceramic Rod , Zirconia
Ceramic Ring and Alumina Ceramic Ring , Zirconia Ceramic Tube and Alumina Ceramic Tube, Ceramic
Pin, Ceramic Shaft , Ceramic Plate And Block, Ceramic Sleeve, Ceramic Injector Nozzle, Ceramic
Dispensing Valve, Ceramic Injection Pump, Ceramic Plunger Pump , Ceramic Piston , Ceramic Stick ,
Ceramic Washer, and Semiconductor Industry Ceramics, Machinable Ceramic Part, Ceramic Electronics
They are applicable to Electrical, Appliance, Mining, Oil & Gas, Energy & Power, Food & Medical, Agriculture, Aerospace,
even other high-end fields.
We can make the product according to your drawings, custom the size, shape, color and thickness etc..
Our products with some certificates, such as SGS, CE, TUV, etc..
To find our more, pls contact us right now without hesitating!
We have almost all the precision processing machines of ceramic products.